Synthesis of PZT solutions for thin films applications are realised either by sol-gel methods using reactive precursors or by
MOD (metallorganic deposition) methods using heavy and/or hydrophobic precursors (applications: piezo or pyroelectric
devices, integrated capacitors). Understanding these processes is difficult because of the complex chemistry of alkoxides.
A specific MOD solution to produce PZT films is taken as an example to study the most important parameters influencing
the behaviour of the final solution during deposition (spin coating) and subsequent thermal treatments. In this context a
pilot reactor was developed in order to control and to measure this main parameters with the objective of a process optimization.